Surfscan® SP1TBI Pro / SP1DLS Pro   Unpatterned Wafer Defect Inspection Systems The Surfscan® SP1TBI Pro and SP1DLS Pro systems are industry-proven process control workhorse systems for unpatterned wafer inspection suited for emerging technologies such as RF, automotive, Si

Archer™ 10XT+   Built on the industry leading Archer platform for optical overlay measurements. The Archer 10XT+ overlay metrology system provides robust,accurate, reliable, and reproducible overlay registration and CD measurements on various substrate types, sizes, materials

Archer™ 200   Overlay Metrology System The Archer 200 overlay metrology system provides robust, accurate, reliable, and reproducible overlay registration and CD measurements on various substrate types, sizes, materials and thicknesses. The industry proven Archer platform prov

Solutions that upgrade Gas lasers to Solid state lasers Gas lasers： Gas lasers have some resulting characteristics due to the inherent properties of their physical state. Advantages: Gas molecules are evenly distributed with a simple energy level, so that the ligh

Ultra Clean Solutions With the key line widths of semiconductor chips shrink, from the early micron (μm) level to the nano (nm) level, chip manufacturing requirements for cleanliness are getting higher and higher, and if the air cleanliness in the production process does not meet the requ