Solutions

Surfscan® SP1TBI Pro / SP1DLS Pro   Unpatterned Wafer Defect Inspection Systems The Surfscan® SP1TBI Pro and SP1DLS Pro systems are industry-proven process control workhorse systems for unpatterned wafer inspection suited for emerging technologies such as RF, automotive, Si

Surfscan® SP2 / SP2XP      Unpatterned Wafer Defect Inspection Systems    The Surfscan® SP2 and SP2XP systems are the 2nd generation of KLA’s revolutionary Surfscan SP1 platform for unpatterned wafer inspection.Incorporating revolutionary ultr

Archer™ 10XT+   Built on the industry leading Archer platform for optical overlay measurements. The Archer 10XT+ overlay metrology system provides robust,accurate, reliable, and reproducible overlay registration and CD measurements on various substrate types, sizes, materials

Archer™ 200   Overlay Metrology System The Archer 200 overlay metrology system provides robust, accurate, reliable, and reproducible overlay registration and CD measurements on various substrate types, sizes, materials and thicknesses. The industry proven Archer platform prov

Archer™ 300   Overlay Metrology System Built on the industry leading Archer platform for optical overlay measurements. The Archer 300 overlay metrology system provides robust, accurate, reliable, and reproducible overlay registration and CD measurements on various substrat